Large-Area MEMS-Based Distributed Bragg Reflectors for Short-Wave and Mid-Wave Infrared Hyperspectral Imaging Applications

PROJECT TITLE :

Large-Area MEMS-Based Distributed Bragg Reflectors for Short-Wave and Mid-Wave Infrared Hyperspectral Imaging Applications

ABSTRACT:

We present the look, fabrication, and optical characterization of silicon-air-silicon-based mostly distributed Bragg reflectors, or quarter wavelength mirrors, in sizes starting from two hundred $mu textmtimes 200~mu textm$ to 5 mm $times$ five mm. Such mirrors will be utilized in conjunction with either single-part photodetectors or giant-area focal plane arrays to appreciate tunable multispectral sensors or adaptive focal plane arrays from the short-wave infrared wavelength ranges (150zero–3000 nm) to mid-wave infrared wavelength (300zero–600zero nm) ranges. Surface optical profile measurements indicate a flatness of the order of twenty–30 nm within the fabricated structures across several millimetres. Single purpose spectral measurements on devices show glorious agreement with simulated optical models. The fabricated distributed Bragg reflectors show $sim 94$ % reflectivity, which is in shut agreement with theoretical reflectivity. The demonstrated high reflectivity across a good wavelength range renders them suitable as broadband reflectors. Finally, we have a tendency to gift optical transmittance modeling results for Fabry-Pérot filters primarily based on these distributed Bragg reflectors. [2015-0161]

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