Proportional Control Valves Integrated in Silicon Nitride Surface Channel Technology
PROJECT TITLE :
We tend to have designed and realized two types of proportional microcontrol valves during a silicon nitride surface channel technology method. This permits on-die integration of flow controllers with alternative surface channel devices, such as pressure sensors or thermal or Coriolis-primarily based (mass) flow sensors, to obtain a proportional gas flow control system on one chip. One valve style is implemented with inlet and outlet channels within the plane of the chip, which permits on-chip flow management between several fluidic parts and permits up to seventy mgh $^-1$ of flow at two hundred mbar. The opposite valve design operates out-of-plane between surface channels and a fluidic inlet, offering a flow range up to 1250 mgh $^-1$ at 60zero mbar, smaller footprint, and low-leakage closure. Measured flow behavior agrees well with laminar flow models created for both valve types. [2015-0060]
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